Ultramicrortorme - RMC MT-7000


   A semi-automated ultramicrotome provides for critical sectioning of embedded specimen. The microtome can be used manually for initial block preparation and thick-sectioning (greater than or equal to 1 micron) and then can be used in fully automated mode for hands-free, critical thin sectioning (less than or equal to 600 angstroms). Diamond knives are available for critical sectioning to provide the highest quality sections.


Plazma genertor : Korea vacuum co., PPE & RIE(reactive ion etching) system


   Dry etch processing systems remove materials from the surface of a silicon wafer, or from films deposited on the wafer, through exposure to plasma, a highly reactive chemical species created in an etch reactor. The reactor not only produces the plasma but controls the chemical and physical reactions that occur on the wafer surface at the atomic level. Through the etch process, selected materials are removed from the wafer or film, which shapes the profile and critical dimensions of the remaining materials.


4-point probe and impedence : EG & G instruments, Model 1025


   Resistivity is important parameter because of impurity of sample especially in semi-conductive department. 4-point probe measures usually the resistivity of bulk sample.
   4-point probe is the equipment which measures the electric resistant of sheets and thin layer by detecting the voltage of between two inner probe and the current of two outer probe.
   The distance of probe-to-probe should be constant and conductive film thickness is 40% of the distance. So surface resistivity (Rs) is Rs = 4.53 x V / I


Electric field applier(Regulated DC Power supply) : Power Korea, PK2CH


   Power supplies use dissipative regulator components to achieve regulation. This dissipative regulation means conversion of excessive power to heat. When using a regulator you have usually an unregulated power supply which gives somewhat higher voltage(above 75V DC) than your electronics needs. You put a dissipative regulator between the power source and your electronics circuit. This regulator keeps the voltage on the output stable. The regulator itself converts the the power determined by voltage difference times output current to need