Device Fabrication Equipments

• Photolithography
• Surface profiler
• Ion beam assisted electron beam evaparator
• UHV electron beam evaporator with RHEED
• Sputter
• Thermal evaporator
• Thermal evaporator with glove box for OELD
• Inductively coupled plasma (ICP) etcher
• PECVD system
• Plasma asher
• Rapid thermal annealing system
• Wet station and clean benches

Electrical characterization equipments

• Probe station for I-V and C-V measurement
• High current measurement system
• Field emission measurement system
• Deep level transient specrtoscopy(DLTS)
• Transconductance(Gm) dispersion measurement

Optical characterization equipments

• Optical measurement system (LED, Photodetector, Transmittance/reflectance)

Public equipments available

• FE-SEM, SEM, XRD, Hall measurement, AFM (Dep.Mat.&Engin.)
• SRPES, HR-XRD, SPEM, PEEM etc. (Pohang Accelerator Lab.)
• SIMS, AES, XPS, XRD, Furnace, FTIR, UPS, etc.(RIST)