Thermal evaporator system is used to fabricate the organic light emitting diodes. The sample is pre-treated by UV-ozone or plasma in pre-chamber. Then the sample is loaded into main chamber through load-rock system.
<Specification>
Tungsten wire basket : 5 ea
Tungsten boat : 2 ea
Base pressure : 5 * 10-6 Torr
Working pressure : 5 * 10-6 Torr
Substrate rotation : available
Glove box